Allalin
Blazing fast quantitative cathodoluminescence microscope
The Allalin is a nanometer resolution spectroscopy instrument, based on a disruptive technology known as quantitative cathodoluminescence that integrates a light microscope and a scanning electron microscope (SEM) into one tool.
The Allalin allows for “No Compromise” large field/fast scanning simultaneous SEM imaging with hyperspectral or panchromatic CL maps. The system was constructed from the ground up to attain the best cathodoluminescence performance without sacrificing the SEM performance: the light microscope and the objective lens of the SEM are carefully integrated so that their focal planes match each other; the light microscope is machined with sub-micrometer precision so as to an achromatic, high numerical aperture (N.A. 0.71) detection with superior photon collection efficiency over a large field of view — up to 300µm — compared with traditional CL technologies. As a result, quantitative cathodoluminescence, where instrument related artifact can intrinsically be ruled out as an explanation for a spectral feature or a contrast, becomes conceivable for the first time.
Key benefits
Designed from the ground up as an integrated CL-SEM system
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Puts optical collection within the electron column
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Requires ZERO optical alignment for CL
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Highest collection efficiency over a field of view (FOV) of 300μm
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Ensures CL uniformity and reproducibility, making the system quantitativeas well asqualitative. Quantitative: the photon collection efficiency is constant (+- 1%) over a large FOV of 300 μm (no vignetting); a 300 μm mapis performed without any displacement of the specimen: cathodoluminescence results are reproducible and comparable.
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Uses lower beam dosages, reducing the possibility for beam damage to sensitive samples
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Fast! Single hyperspectral CLmap measurement time ranges from 18 s to30 min compared to the competition’s 30 min – multiple hours
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Simultaneous generation of a SEM image and a hyperspectral CL image with no degradation of the electron probe size
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Schottky FEG for high current densities from: 30pAto 300nA
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Highest resolution SEM inCL mode: down to 3nm
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Intuitive User Interface and specialized software
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Touch screen control with easy to navigate context based GUI that does not require anexpert to operate the tool
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Dedicated Attomaphyperspectral analysis software (see separate brochure)
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High precision nanopositioning stage with low temperature option (10K to room temperature)
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Highly versatile: Optical hub for integration of the Attolight CL instrument in a larger spectroscopic system or complement its functionality
System Cofigurations
Schematic setup of an Allalin system showing the main components.
